The equipment is used to dilute process chemicals in course of semiconductors manufacture. Dilution is carried out in an automatic mode with deionised water in a mixing hydraulic loop by means of dosing adjusted ratios of chemical and water into a mixing tank. The diluted chemical in the mixing tank circulates for a defined time in order to get mixed. The diluted dose of the chemical is then pumped over into the storage tank where it is ready for distribution in follow-up process equipment.
- A frame made of chemically resistant PVC which meets the standard FM4910.
- Covers made of transparent PVC, fitted with safety sensors indicating that the covers are closed.
- Two pneumatically driven membrane pumps.
- pH measurement in the mixing tank.
- Flow meters at the inlet and outlet of the distribution loop.
- An IBC container of 1,000 litres in volume as a storage tank
- Control system Unitronics.
- Dimensions of the box 900 x 1,110 x 2,300 mm.
